Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori | 2019-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori | 2019-12-10 |