Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori, Takayoshi Tsutsumi | 2019-12-10 |
| 10435790 | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap | Atsuki Fukazawa, Masaki Tokunaga, Hideaki Fukuda | 2019-10-08 |
| 10283353 | Method of reforming insulating film deposited on substrate with recess pattern | Akiko Kobayashi, Nobuyoshi Kobayashi, Masaru Hori | 2019-05-07 |