Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435790 | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap | Atsuki Fukazawa, Masaru Zaitsu, Hideaki Fukuda | 2019-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435790 | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap | Atsuki Fukazawa, Masaru Zaitsu, Hideaki Fukuda | 2019-10-08 |