Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418224 | Plasma etching method | Ken'etsu Yokogawa, Nobuyuki Negishi, Masami Kamibayashi, Masatoshi Miyake | 2019-09-17 |
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura, Masaru Izawa +2 more | 2019-09-17 |
| 10310321 | Optical element, manufacturing method of optical element, and optical device | Koji Hirata, Hiroyuki Minemura, Yumiko Anzai, Tetsuya Nishida, Jiro Yamamoto +2 more | 2019-06-04 |