Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Masaru Izawa, Hiroyuki Kobayashi, Yutaka Kouzuma +2 more | 2019-06-18 |
| 10290472 | Vacuum processing apparatus | Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more | 2019-05-14 |
| 10192720 | Plasma processing apparatus | Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai, Masaru Izawa | 2019-01-29 |