Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D864885 | Infrared lamp heater transmission window for semiconductor manufacturing apparatus | Michiaki Kobayashi, Kazuyuki Hirozane, Akio Harada, Nobuhide Nunomura | 2019-10-29 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Masaru Izawa, Nobuya Miyoshi, Hiroyuki Kobayashi +2 more | 2019-06-18 |
| 10290472 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai +1 more | 2019-05-14 |