Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Nobuya Miyoshi, Hiroyuki Kobayashi, Yutaka Kouzuma +2 more | 2019-06-18 |
| 10290472 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2019-05-14 |
| 10217611 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2019-02-26 |
| 10192720 | Plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai | 2019-01-29 |