KY

Ken'etsu Yokogawa

HH Hitachi High-Technologies: 1 patents #144 of 434Top 35%
Overall (2019): #384,780 of 560,194Top 70%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10418224 Plasma etching method Naoyuki Kofuji, Nobuyuki Negishi, Masami Kamibayashi, Masatoshi Miyake 2019-09-17