Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242290 | Method, system, and user interface for metrology target characterization | Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski +4 more | 2019-03-26 |
| 10203200 | Analyzing root causes of process variation in scatterometry metrology | Tal Marciano, Michael Adel, Barak Bringoltz, Dana Klein, Tal Itzkovich +2 more | 2019-02-12 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |