Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475691 | Substrate transfer hand | Yasuyuki Motoshima, Yohei Eto | 2019-11-12 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Hisanori Matsuo, Yasuyuki Motoshima, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |
| 10373845 | Substrate cleaning apparatus and substrate cleaning method | Fujihiko Toyomasu, Mitsunori Komatsu | 2019-08-06 |
| 10340159 | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit | Fujihiko Toyomasu, Junji Kunisawa | 2019-07-02 |
| 10259098 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Hisanori Matsuo | 2019-04-16 |
| 10201520 | Bicyclic compound and use thereof for medical purposes | Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani | 2019-02-12 |
| 10195712 | Polishing method and polishing apparatus | Hisanori Matsuo, Yasuyuki Motoshima | 2019-02-05 |