Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500691 | Substrate processing apparatus and substrate processing method | Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa, Takeshi Iizumi +1 more | 2019-12-10 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10229841 | Wafer drying apparatus and wafer drying method | Satomi Hamada | 2019-03-12 |