Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Takeshi Iizumi +1 more | 2019-12-10 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2019-11-26 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10361101 | Substrate cleaning apparatus and substrate processing apparatus X | Yoshitaka Kitagawa, Hisajiro Nakano | 2019-07-23 |
| 10343192 | Liquid supplying device and liquid supplying method | Fujihiko Toyomasu | 2019-07-09 |
| 10340159 | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit | Fujihiko Toyomasu, Toru Maruyama | 2019-07-02 |