Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki +1 more | 2019-10-08 |
| 10373845 | Substrate cleaning apparatus and substrate cleaning method | Toru Maruyama, Mitsunori Komatsu | 2019-08-06 |
| 10343192 | Liquid supplying device and liquid supplying method | Junji Kunisawa | 2019-07-09 |
| 10340159 | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit | Toru Maruyama, Junji Kunisawa | 2019-07-02 |