Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yasuyuki Motoshima, Yohei Eto | 2019-09-17 |
| 10373845 | Substrate cleaning apparatus and substrate cleaning method | Fujihiko Toyomasu, Toru Maruyama | 2019-08-06 |