Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri, Panart Khajornrungruang | 2019-11-19 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Yasuyuki Motoshima, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |
| 10401285 | Apparatus for measuring surface properties of polishing pad | Keiichi Kimura, Keisuke Suzuki, Panart Khajornrungruang, Takashi Kushida | 2019-09-03 |
| 10369675 | CMP apparatus having polishing pad surface property measuring device | — | 2019-08-06 |
| 10259098 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2019-04-16 |
| 10195712 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2019-02-05 |