Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Keisuke Suzuki, Takahiro Tajiri, Panart Khajornrungruang | 2019-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Keisuke Suzuki, Takahiro Tajiri, Panart Khajornrungruang | 2019-11-19 |