Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri | 2019-11-19 |
| 10401285 | Apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Keiichi Kimura, Keisuke Suzuki, Takashi Kushida | 2019-09-03 |