Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475691 | Substrate transfer hand | Toru Maruyama, Yasuyuki Motoshima | 2019-11-12 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yasuyuki Motoshima, Mitsunori Komatsu | 2019-09-17 |