Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475691 | Substrate transfer hand | Toru Maruyama, Yohei Eto | 2019-11-12 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |
| 10259098 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2019-04-16 |
| 10195712 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2019-02-05 |