Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2019-12-10 |
| 10446418 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Yogananda Sarode Vishwanath | 2019-10-15 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2019-09-17 |
| 10347522 | Method to remove residual charge on a electrostatic chuck during the de-chucking step | Wendell Glen Boyd, Jr., Robert T. Hirahara | 2019-07-09 |
| 10211033 | Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity | Andrew Nguyen, Yogananda Sarode Vishwanath | 2019-02-19 |