Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468285 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi +2 more | 2019-11-05 |
| 10319649 | Optical emission spectroscopy (OES) for remote plasma monitoring | Soonam Park, Junghoon Kim, Dmitry Lubomirsky, Shankar Venkataraman | 2019-06-11 |
| 10167556 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | David N. Ruzic, Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Zihao Ouyang | 2019-01-01 |