Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361091 | Porous low-k dielectric etch | Eric A. Hudson, Shashank Deshmukh, Sonny Li, Chia-Chun Wang, Prabhakara Gopaladasu | 2019-07-23 |
| 10167556 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | David N. Ruzic, Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Tae Seung Cho | 2019-01-01 |