Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510550 | Polarization-dependent laser-assisted plasma etching | Jason Anthony Peck | 2019-12-17 |
| 10332731 | Method of and magnet assembly for high power pulsed magnetron sputtering | Ivan Shchelkanov, Priya Raman | 2019-06-25 |
| 10167556 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Zihao Ouyang, Tae Seung Cho | 2019-01-01 |