Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10450653 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Juan Carlos Rocha-Alvarez, Zheng John Ye, Ramprakash Sankarakrishnan, Jianhua Zhou | 2019-10-22 |
| 10347465 | Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber | Jian J. Chen, Amit Kumar BANSAL | 2019-07-09 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor, Binh Nguyen +6 more | 2019-03-12 |
| 10192717 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2019-01-29 |