Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10496781 | Metrology recipe generation using predicted metrology images | Chao Fang, Brian Duffy | 2019-12-03 |
| 10475712 | System and method for process-induced distortion prediction during wafer deposition | Ady Levy | 2019-11-12 |
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | Onur N. Demirer, William Pierson, Jeremy Nabeth, Miguel Garcia-Medina, Lipkong Yap | 2019-10-15 |
| 10340165 | Systems and methods for automated multi-zone detection and modeling | Jeremy Nabeth, Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Christian Sparka +4 more | 2019-07-02 |
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko, Pradeep Subrahmanyan +1 more | 2019-02-26 |
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Stewart Robertson, Pradeep Subrahmanyan | 2019-02-19 |