Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504798 | Gate cut in replacement metal gate process | Ruilong Xie, Chanro Park, Laertis Economikos, Andrew M. Greene, John R. Sporre | 2019-12-10 |
| 10347540 | Gate cut using selective deposition to prevent oxide loss | Andrew M. Greene, Ekmini Anuja De Silva | 2019-07-09 |
| 10229854 | FinFET gate cut after dummy gate removal | John R. Sporre, Andrew M. Greene, Jeffrey C. Shearer, Nicole Saulnier | 2019-03-12 |
| 10167558 | Phase shifted gas delivery for high throughput and cost effectiveness associated with atomic layer etching and atomic layer deposition | Fee Li Lie, Eric R. Miller, Hyung Joo Shin | 2019-01-01 |