Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249533 | Method and structure for forming a replacement contact | Jeffrey C. Shearer, John R. Sporre, Nicole Saulnier | 2019-04-02 |
| 10167558 | Phase shifted gas delivery for high throughput and cost effectiveness associated with atomic layer etching and atomic layer deposition | Fee Li Lie, Siva Kanakasabapathy, Eric R. Miller | 2019-01-01 |
| 10170323 | Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos | 2019-01-01 |