Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490480 | Copper microcooler structure and fabrication | Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta | 2019-11-26 |
| 10490481 | Copper microcooler structure and fabrication | Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta | 2019-11-26 |
| 10388521 | Method to increase the lithographic process window of extreme ultra violet negative tone development resists | Nelson Felix, Martin Glodde | 2019-08-20 |
| 10386716 | Mechanical isolation control for an extreme ultraviolet (EUV) pellicle | — | 2019-08-20 |
| 10347486 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Nelson Felix, Daniel A. Corliss, Rudy J. Wojtecki | 2019-07-09 |
| 10345702 | Polymer brushes for extreme ultraviolet photolithography | Martin Glodde, Ankit Vora | 2019-07-09 |
| 10312087 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Martin Glodde | 2019-06-04 |
| 10276384 | Plasma shallow doping and wet removal of depth control cap | Robert L. Bruce, Kevin K. Chan, Sebastian U. Engelmann, Marinus Hopstaken, Mahmoud Khojasteh +3 more | 2019-04-30 |
| 10241396 | Mechanical isolation control for an extreme ultraviolet (EUV) pellicle | — | 2019-03-26 |