Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388521 | Method to increase the lithographic process window of extreme ultra violet negative tone development resists | Nelson Felix, Dario L. Goldfarb | 2019-08-20 |
| 10345702 | Polymer brushes for extreme ultraviolet photolithography | Dario L. Goldfarb, Ankit Vora | 2019-07-09 |
| 10312087 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Dario L. Goldfarb | 2019-06-04 |
| 10170301 | Adhesion of polymers on silicon substrates | — | 2019-01-01 |