Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490480 | Copper microcooler structure and fabrication | Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Dinesh Gupta, Dario L. Goldfarb | 2019-11-26 |
| 10490481 | Copper microcooler structure and fabrication | Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Dinesh Gupta, Dario L. Goldfarb | 2019-11-26 |
| 10429743 | Optical mask validation | Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf | 2019-10-01 |
| 10347486 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki | 2019-07-09 |
| 10281826 | Determination of lithography effective dose uniformity | Luciana Meli Thompson, Christopher F. Robinson | 2019-05-07 |
| 10274836 | Determination of lithography effective dose uniformity | Luciana Meli Thompson, Christopher F. Robinson | 2019-04-30 |