Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281826 | Determination of lithography effective dose uniformity | Daniel A. Corliss, Christopher F. Robinson | 2019-05-07 |
| 10274836 | Determination of lithography effective dose uniformity | Daniel A. Corliss, Christopher F. Robinson | 2019-04-30 |