Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10490435 | Cooling element for an electrostatic chuck assembly | Roberto Cesar Cotlear, Andreas Schmid | 2019-11-26 | $24,423,000 |
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more | 2019-10-29 | $23,960,000 |
| 10290469 | Enhanced plasma source for a plasma reactor | Valentin N. Todorow, Gary Leray, Li-Sheng Chiang | 2019-05-14 | $40,982,000 |
| 10283397 | Substrate lift pin actuator | Roberto Cesar Cotlear | 2019-05-07 | $13,988,000 |
| 10257887 | Substrate support assembly | Alexander Matyushkin, Dan Katz, John Holland, Theodoros Panagopoulos | 2019-04-09 | $19,096,000 |
| 10186444 | Gas flow for condensation reduction with a substrate processing chuck | Hun Sang Kim | 2019-01-22 | $28,931,000 |