Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490435 | Cooling element for an electrostatic chuck assembly | Michael D. Willwerth, Roberto Cesar Cotlear | 2019-11-26 |
| 10393152 | Stamp-sealing unit and ultrasonic processing device comprising same | Volker Aust | 2019-08-27 |