Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490435 | Cooling element for an electrostatic chuck assembly | Michael D. Willwerth, Andreas Schmid | 2019-11-26 |
| 10283397 | Substrate lift pin actuator | Michael D. Willwerth | 2019-05-07 |