Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481502 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more | 2019-11-19 |
| 10209624 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2019-02-19 |