Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162277 | Extreme ultraviolet lithography system with debris trapper on exhaust line | Shang-Chieh Chien, Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Guan-Heng Liu +2 more | 2018-12-25 |
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Bo-Tsun Liu, Han-Lung Chang | 2018-12-25 |
| 10146141 | Lithography process and system with enhanced overlay quality | Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu +6 more | 2018-12-04 |
| 10048604 | System and method for lithography with leveling sensor | — | 2018-08-14 |