Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Bo-Tsun Liu, Li-Jui Chen, Han-Lung Chang | 2018-12-25 |
HC
Hsin-Feng Chen
Overall (2018): #394,203 of 503,207Top 80%
1
Patents 2018