Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Bo-Tsun Liu, Li-Jui Chen | 2018-12-25 |
HC
Han-Lung Chang
Overall (2018): #405,639 of 503,207Top 85%
1
Patents 2018