Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Li-Jui Chen, Han-Lung Chang | 2018-12-25 |
BL
Bo-Tsun Liu
Overall (2018): #473,375 of 503,207Top 95%
1
Patents 2018