Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133178 | Coating liquid for resist pattern coating | Shuhei Shigaki, Noriaki Fujitani, Takafumi Endo, Rikimaru Sakamoto | 2018-11-20 |
| 10113083 | Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound | Ryuji Ohnishi, Ryuta MIZUOCHI, Yasushi Sakaida, Rikimaru Sakamoto | 2018-10-30 |
| 9910354 | Resist underlayer film-forming composition and method for forming resist pattern using the same | Yasushi Sakaida, Noriaki Fujitani, Rikimaru Sakamoto | 2018-03-06 |