Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113083 | Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound | Ryuji Ohnishi, Tokio NISHITA, Yasushi Sakaida, Rikimaru Sakamoto | 2018-10-30 |
| 10042247 | Mask blank, method for manufacturing mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Yasushi Sakaida, Rikimaru Sakamoto, Masaki Nagai | 2018-08-07 |