Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113083 | Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound | Ryuji Ohnishi, Ryuta MIZUOCHI, Tokio NISHITA, Rikimaru Sakamoto | 2018-10-30 |
| 10067423 | Additive and resist underlayer film-forming composition containing the same | Yuto HASHIMOTO, Kenji Takase, Rikimaru Sakamoto | 2018-09-04 |
| 10042247 | Mask blank, method for manufacturing mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2018-08-07 |
| 10025191 | Polymer-containing coating liquid applied to resist pattern | Shuhei Shigaki, Rikimaru Sakamoto | 2018-07-17 |
| 9910354 | Resist underlayer film-forming composition and method for forming resist pattern using the same | Tokio NISHITA, Noriaki Fujitani, Rikimaru Sakamoto | 2018-03-06 |