Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133178 | Coating liquid for resist pattern coating | Tokio NISHITA, Shuhei Shigaki, Takafumi Endo, Rikimaru Sakamoto | 2018-11-20 |
| 10042258 | Composition for forming a resist upper-layer film and method for producing a semiconductor device using the composition | Takafumi Endo, Rikimaru Sakamoto | 2018-08-07 |
| 9977331 | Resist overlayer film forming composition and method for producing semiconductor device including the same | Rikimaru Sakamoto | 2018-05-22 |
| 9927705 | Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same | Takafumi Endo, Ryuji Ohnishi, Rikimaru Sakamoto | 2018-03-27 |
| 9910354 | Resist underlayer film-forming composition and method for forming resist pattern using the same | Yasushi Sakaida, Tokio NISHITA, Rikimaru Sakamoto | 2018-03-06 |