Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133178 | Coating liquid for resist pattern coating | Tokio NISHITA, Shuhei Shigaki, Noriaki Fujitani, Rikimaru Sakamoto | 2018-11-20 |
| 10042258 | Composition for forming a resist upper-layer film and method for producing a semiconductor device using the composition | Noriaki Fujitani, Rikimaru Sakamoto | 2018-08-07 |
| 10017664 | Novolac resin-containing resist underlayer film-forming composition using bisphenol aldehyde | Keisuke Hashimoto, Hirokazu Nishimaki, Rikimaru Sakamoto | 2018-07-10 |
| 9927705 | Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same | Noriaki Fujitani, Ryuji Ohnishi, Rikimaru Sakamoto | 2018-03-27 |