Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113083 | Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound | Ryuta MIZUOCHI, Tokio NISHITA, Yasushi Sakaida, Rikimaru Sakamoto | 2018-10-30 |
| 9927705 | Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same | Noriaki Fujitani, Takafumi Endo, Rikimaru Sakamoto | 2018-03-27 |