Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133178 | Coating liquid for resist pattern coating | Tokio NISHITA, Noriaki Fujitani, Takafumi Endo, Rikimaru Sakamoto | 2018-11-20 |
| 10082735 | Silicon-containing resist underlayer film-forming composition having organic group having aliphatic polycyclic structure | Wataru SHIBAYAMA, Makoto Nakajima, Satoshi Takeda, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-09-25 |
| 10025191 | Polymer-containing coating liquid applied to resist pattern | Yasushi Sakaida, Rikimaru Sakamoto | 2018-07-17 |