Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139729 | Coating composition for pattern reversal on soc pattern | Hiroaki Yaguchi, Makoto Nakajima, Satoshi Takeda, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-11-27 |
| 10082735 | Silicon-containing resist underlayer film-forming composition having organic group having aliphatic polycyclic structure | Shuhei Shigaki, Makoto Nakajima, Satoshi Takeda, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-09-25 |