Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916994 | Substrate support with multi-piece sealing surface | Olkan Cuvalci, Gwo-Chuan Tzu | 2018-03-13 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Joseph M. Ranish, Ashish Goel, Joung Joo Lee | 2018-02-27 |
| 9888528 | Substrate support with multiple heating zones | Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Manjunatha Koppa | 2018-02-06 |