Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096455 | Extended dark space shield | Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang | 2018-10-09 |
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2018-08-07 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed +1 more | 2018-05-01 |
| 9928997 | Apparatus for PVD dielectric deposition | Keith A. Miller, Ilya Lavitsky, Randy D. Schmieding, Prashanth Kothnur | 2018-03-27 |