Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153185 | Substrate temperature measurement in multi-zone heater | Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2018-12-11 |
| 10113231 | Process kit including flow isolator ring | Dale R. DuBois, Kalyanjit Ghosh, Kien N. Chuc, Mayur Govind Kulkarni, Yanjie Wang +1 more | 2018-10-30 |
| 10017855 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Mayur Govind Kulkarni, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2018-07-10 |
| 9889567 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari Ponnekanti, Prajeeth Wilton | 2018-02-13 |